Micro-electromechanical systems (MEMS) are micromachines that allow computation, sensing, mobility, and manipulation at small scales down to the size of microns. During the past decade, MEMS technology has allowed the development of many advanced devices that have found their way to the market. Ever increasing needs for MEMS are fueled by the exponential growth of markets such as cell phones, gaming, and communications and military applications. Both quality and price requirements put stringent specifications on the new MEMS devices. Feedback control techniques facilitate reliably meeting these specifications. This book provides the reader with control strategies and design techniques in a collection of practical examples, covering topics such as dynamical modeling of MEMS devices, dynamic control for performance improvement, and improved MEMS design based on control system analysis.

Bruno Borovic received his B.S. and M.S. degrees in control engineering in 1996 and 1999, respectively. His PhD research involved merging control techniques with MEMS field. In 2005, he joined Invensense, to work on development of MEMS inertial sensors. From 2010, he has been working with MEMS and underwater robotics with Univ. of Zagreb, Croatia.