Micro/Nano Robotics and Automation technologies have rapidly grown associated with the growth of Micro and Nanotechnologies. This book presents a summary of fundamentals in micro-nano scale engineering and the current state of the art of these technologies.

Micro-Nanorobotic Manipulation Systems and their Applications introduces these advanced technologies from the basics and applications aspects of Micro/Nano-Robotics and Automation from the prospective micro/nano-scale manipulation. The book is organized in 9 chapters including anoverview chapter of Micro/Nanorobotics and Automation technology from the historical view and important related research works. Further chapters are devoted tothe physics of micro-nano fields as well as to material and science, microscopes, fabrication technology, importance of biological cell, and control techniques. Furthermore important examples, applications and a concise summary of Micro-Nanorobotics and Automation technologies are given.

Introduction of Micro-Nanorobotic Manipulation Systems.- Physics in Micro-Nano Scale.- Basics of Micro-Nanorobotic Manipulation Systems.- Micromanipulation System under Optical Microscope.- Applications of Micromanipulation System under Optical Microscope.- Nanomanipulation System under Electron Microscopes.- Applications of Nanomanipulation System under FE-SEM-TEM.- Applications of Nanomanipulation System under E-SEM.